|Introduction||Halftone and CD are simultaneously measured to optimize process conditions such as exposure amount, coating amount, and etching amount in LCD process|
Simultaneous measurement of CD / thickness / height in one measurement
Nano-level resolution, high-speed measurement
Measurement Item: Halftone thickness, Overlay, Hole, PR, Metal, ITO Slit line width measurement etc.
|Application||TFT Photo process, TFT PECVD process, Flexible TFT substrate PI thickness measurement|