PSISPhoto Spacer Inspection System
|Introduction||For accurate calculation of liquid crystal input amount in LCD process, measure PS of CF substrate or bump height of TFT substrate|
Non-contact three-dimensional surface measurement
Nano-level resolution, high-speed measurement
Measurement Item : PS / Bump height and CD, RGB step height, COA Via Hole depth and stepheight, Overlay, etc.
|Application||LCD CF / CELL / TFT process, OLED Frit height and CD measurement, and other fields requiring high precision three-dimensional surface shape measurement|