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Product introduction

Non-contact three-dimensional surface shape measurement

PSISPhoto Spacer Inspection System

Introduction For accurate calculation of liquid crystal input amount in LCD process, measure PS of CF substrate or bump height of TFT substrate
Features Non-contact three-dimensional surface measurement
Nano-level resolution, high-speed measurement
Measurement Item : PS / Bump height and CD, RGB step height, COA Via Hole depth and stepheight, Overlay, etc.
Application LCD CF / CELL / TFT process, OLED Frit height and CD measurement, and other fields requiring high precision three-dimensional surface shape measurement